The A800DAC is an atomic layer deposition and coating device with a complete Cluster system for advanced manufacturing processes. A variety of advanced thin film applications such as high insulation, good barrier, low impurity passivation and/or packaging can be prepared to meet the requirements of semiconductor or universal semiconductor markets such as power devices, Micro-OLED, advanced packaging, etc.

Excellent adhesion and conformal properties in complex structures

With high quality wear resistance

With high quality waterproof gas erosion performance

Fully automated substrate loading

Advanced control systems for Industry 4.0

ALD system design approved by international certification bodies